Quantification of Trace-Level Silicon Doping in Al<i>_x</i>Ga_1–<i>x</i>N Films Using Wavelength-Dispersive X-Ray Microanalysis

Application of Wavelength Dispersive X-Ray Spectroscopy in X-Ray Trace Element Analytical Techniques

Decomposition of Wavelength Dispersive X-Ray Spectra

Line shapes of atomic lines and soft x-ray emission bands measured with a wavelength dispersive spectrometer (WDS) with the Electron Probe Micro Analyzer (EPMA) are reviewed. Least square fitting to pseudo-Voigt profiles of the digitally measured spectra are used to account for the presence of non-diagram features (high and low energy satellites) and instrumental induced distortions. The effect...

Mistakes encountered during automatic peak identification of minor and trace constituents in electron-excited energy dispersive X-ray microanalysis.

Automated peak identification in electron beam-excited X-ray microanalysis with energy dispersive X-ray spectrometry has been shown to be subject to occasional mistakes even on well-separated, high-intensity peaks arising from major constituents (arbitrarily defined as a concentration, C, which exceeds a mass fraction of 0.1). The peak identification problem becomes even more problematic for co...

Optimization of Wavelength Dispersive X-Ray Spectrometry Analysis Conditions

In setting up the conditions for quantitative wavelength-dispersive electron microprobe analysis a number of parameters have to be defined for each element, namely accelerating voltage, beam current, and (for each element) x-ray line, spectrometer crystal, pulse-height analyser settings, background offsets, and counting times for peak and background. The choices made affect both the reliability...

Energy-dispersive x-ray microscopy to trace gadolinium in tissues.

An electron microscopic technique, energy-dispersive x-ray (EDX) analysis, was applied to rat tissue specimens containing gadolinium diethylenetriamine-pentaacetic acid (DTPA). EDX spectroscopy was able to detect the characteristic radiation spectra of gadolinium from tissues in concentrations as low as 0.005 mmol per gram of tissue. A mapping algorithm allowed the detected spectra to be assign...